Inorganic Nanocomposite Solar Cells
by Atomic Layer Deposition (ALD)
September 2005 - August 2008
Investigators
Stacey Bent, Department of Chemical Engineering; James Harris,
Department of Electrical Engineering; Michael McGehee, Department of
Materials Science and Engineering, Stanford University
Objective
This project is a fundamental study into the development of
low-cost, thin film solar cells. It explores the fabrication of
semiconductor nanocomposites for photovoltaics using nanostructured
materials and atomic layer deposition (ALD). The focus is on cells
built by high-throughput techniques where multiple junctions, ultrathin
layers, and nanoporous structures are used to achieve good energy
conversion efficiencies at low cost.
Background
There is a strong need for the development of photovoltaic cells
with low cost, high efficiency, and stability. The broad energy
distribution of the solar spectrum creates a fundamental challenge for
the development of devices capable of efficient photovoltaic
conversion. A multiple junction approach uses stacked cells of
different materials so that each different cell converts a portion of
the spectrum with an efficiency approaching the 70% single wavelength
conversion. In thin film technologies, there exists a common problem
with conversion efficiency where the photogenerated electrons and holes
can recombine and are hence lost for power conversion. If the solar
cell can be made using nanoscale heterojunctions, then the problem of
recombination through traps can be greatly reduced. ALD is particularly
well suited for this application since it can allow for deposition on
complex non-planar structures at the nanoscale level with controllable
thickness. With nanoscale diffusion lengths, the materials constraints
can be relaxed, and low cost deposition routes become acceptable.
Approach

Figure 1: Schematic illustration of
the nanostructured multijunction solar cell design.
The nanostructured template is coated by ALD
with several semiconducting layers to generate two
p-n junctions separated by a tunnel junction.
The basic proposed structure for a nanostructured multijunction
solar cell is illustrated in Figure 1. It consists of a nanostructured
substrate that is coated with semiconducting layers through ALD. There
are three major issues which must be addressed in these proposed solar
cells: First is the development of the nanostructured substrates with
variable pore size and morphology. Second is the issue of ALD of Ge or
other material into the nanostructured substrate and the subsequent
growth of additional layers of nano-structured material, such as GaAs.
The third challenge is the electrical connection and current collection
from all of the nanostructured p/n junctions.
The nanostructured substrate forming the silicon layer of the
heterojunction solar cell will be created by one of several approaches.
These various approaches are to develop substrates with variable pore
size and morphology. The following three structures will be considered:
porous silicon, sintered films of silicon nanocrystals, and anodic
alumina.
Atomic layer deposition is the key enabling technology for the
fabrication of the inorganic nanocomposite solar cells. The novelty of
ALD is the ability to carry out the fabrication at higher throughput
than that of competing inorganic solar cells designs, and hence at
lower cost. ALD has the unique property of following the contours of
non-planar surfaces, and the ability to deposit nanoscale films of
controllable thickness in porous or nanostructured materials. The
adsorption-controlled layer-by-layer reactions characteristic of ALD
allows for the precise control of film thickness, excellent
conformability and uniformity over large areas. Faster processing times
is made possible by both the nanostructure-based design and the nature
of the ALD process. Ultimately the thinner films, fast deposition, and
batch processing should allow the design to be scaled up to develop a
high throughput process.
In the primary structure, ALD will be used to deposit Ge onto the
nanostructured Si substrate to form Ge/Si nanocrystalline p/n
junctions. The ALD process is illustrated in Figure 2. It consists of
an alternating series of self-limiting chemical reactions, called
half-reactions, between gas phase precursors and the substrate. The
precursors are pulsed into the reactor in a sequential fashion. Ge is
chosen for two reasons: it has a direct bandgap just slightly above its
indirect bandgap minimum and its bandgap is ~0.7eV. This combination of
direct gap and its value mean that Ge will absorb a very large fraction
of the IR portion of the solar spectrum. These materials form the
structure of a single heterojunction solar cell.

Figure 2: Schematic illustration of the
ALD process. Alternating pulses of two different precursors, separated
by a purge pulse of an inert gas, constitute a typical ALD cycle.
Multiple ALD cycles are used to deposit a film.
Electrical connections to the nanostructured cells will need to be
developed. Sputter deposited metals will be used initially, but the
possibility of using selective deposition or contact printing methods
to deposit metals only where desired will also be investigated. Another
challenge for the multijunction approach is to achieve current matching
between the two cells as the overall efficiency drops rapidly when
equal currents are not present in both cells. Single nanostructured
cells of each material combination will first be developed and then
accurately modeled for both the optical path/absorption and electrical
path/collection efficiency for photogenerated electrons and holes in
each semiconductor layer. The information developed from the single
heterojunction cells will be necessary to achieving current matching.
Issued August 2005